JPH0643518Y2 - 分子ポンプのシール装置 - Google Patents
分子ポンプのシール装置Info
- Publication number
- JPH0643518Y2 JPH0643518Y2 JP6686188U JP6686188U JPH0643518Y2 JP H0643518 Y2 JPH0643518 Y2 JP H0643518Y2 JP 6686188 U JP6686188 U JP 6686188U JP 6686188 U JP6686188 U JP 6686188U JP H0643518 Y2 JPH0643518 Y2 JP H0643518Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- molecular pump
- sealing device
- thread groove
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 title claims description 5
- 239000007789 gas Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6686188U JPH0643518Y2 (ja) | 1988-05-23 | 1988-05-23 | 分子ポンプのシール装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6686188U JPH0643518Y2 (ja) | 1988-05-23 | 1988-05-23 | 分子ポンプのシール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01173493U JPH01173493U (en]) | 1989-12-08 |
| JPH0643518Y2 true JPH0643518Y2 (ja) | 1994-11-14 |
Family
ID=31292249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6686188U Expired - Lifetime JPH0643518Y2 (ja) | 1988-05-23 | 1988-05-23 | 分子ポンプのシール装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0643518Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202013002969U1 (de) * | 2013-03-27 | 2014-06-30 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
-
1988
- 1988-05-23 JP JP6686188U patent/JPH0643518Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01173493U (en]) | 1989-12-08 |
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